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| 纳米级微动试验台隔振理论研究 |
| Researches in the Theory of Vibration Isolated Nanometre Micro Dynamic Test-platform |
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| DOI： |
| 中文关键词: 纳米 微动试验台 隔振 传递率 |
| 英文关键词: nanometre micro dynamic test-platform vibration isolaisolafion transfer ratio |
| 基金项目:国家自然科学基金(59875038) |
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| 摘要点击次数: 6527 |
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| 中文摘要: |
| 隔振技术是纳米技术中的关键问题之一。通过二维隔振系统的力学分析,设计出了纳米级微动试验台的隔振系统。该系统具有良好的隔振效果,对超精密机床、超精定位机构等的超低传递率隔振设计有一定的参考价值。 |
| 英文摘要: |
| According to the mechanical analysis of two-dimentional vibration isolating system,the author achieved the conclusion about mass,stiffness and damping ration which is useful to design multi-dof vibration isolating system,and designed a vibration isolating system of nanaometre-micro dynamic test-platform.This paper shows the system having a fine vibration isloating effect and the method of the vi- bration isolating design also having a certain reference value to the design with super-low transfer ratio of super-preeision machine tool and super-mlcro positioning mechanism,etc. |
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