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| 纳米级位移测量技术综述 |
| A Survey of Nanometer Displacement-measuring Technolgy |
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| DOI： |
| 中文关键词: 精密测量 超精密测量 纳米级测量 位移测量 |
| 英文关键词: precision measurement ultra-precision measurement nanometer measurement displacement measurement |
| 基金项目:国家自然科学基金(59875038) |
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| 摘要点击次数: 6375 |
| 全文下载次数: 5415 |
| 中文摘要: |
| 综述了当今国内外纳米级位移测量技术的研究状况和最新成果,重点介绍其工作原理和性能。探讨了纳米级位移测量的关键技术,并展望纳米级位移测量技术的发展方向及在超精、微细加工领域的应用前景。 |
| 英文摘要: |
| This paper makes a survey of the current research situation and the recent achievements of nanometer displacement-measuring technology domestically and abroad,focuses on the introduction of operational principles and properties.The authors also discuss the key technology,forecast its edvelopment tendency and the future application in ultra-precision and micro manufacturing fields. |
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