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| 溅射法制备梯度薄膜研究进展 |
| Progress in the Research of Gradient Film Preparation by Sputtering |
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| DOI：10.3969/j.issn.1671-5322.2009.03.007 |
| 中文关键词: 梯度薄膜 气体流量 溅射参数 |
| 英文关键词: gradient film gas flow rate sputtering parameter |
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| 中文摘要: |
| 梯度薄膜是一种涂覆型梯度材料,具有均质薄膜无法比拟的优越性.溅射法效率较高且环保,较广泛地应用于梯度薄膜的制备.对于反应溅射,可通过连续改变反应气体流量制得化学成分比连续变化的梯度薄膜.对于非反应溅射,可通过溅射一系列不同成分比的靶材制得梯度薄膜,但成本较高,且梯度层有限.而通过连续改变溅射参数来制备梯度薄膜是较常用的方法. |
| 英文摘要: |
| Gradient film is a kind of coating of gradient material and superior to homogeneous film.The method of sputtering is widely used to prepare gradient films because of its high efficiency and environmental protection.For reactive sputtering,the gradient films with varying ratio of chemical component can be prepared by changing gas flow rate continuously.For non-reactive sputtering,the gradient films can be prepared by sputtering a series of targets with different composition proportions,but the costs are higher and the number of layers is limited.The gradient films are usually prepared by changing sputtering parameters continuously. |
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