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| 磁控溅射制备Cu-Al合金薄膜及光吸收性能研究 |
| Preparation of Cu-Al Alloy Film by Magnetron Sputtering and Investigation of Their Optical Absorption Properties |
| 投稿时间：2018-11-22 |
| DOI：10.16018/j.cnki.cn32-1650/n.201901002 |
| 中文关键词: Cu-Al合金薄膜 表面等离子体共振 纳米颗粒 热处理 |
| 英文关键词: Cu-Al alloy films surface plasma resonance nanoparticle heat treatment |
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| 中文摘要: |
| 为使沉积态Cu-Al合金薄膜有显著的表面等离子体共振(SPR)吸收峰，采用磁控溅射法分别制备了纯Cu、纯Al和Cu-Al合金薄膜，并采用X射线衍射仪、紫外-可见分光光度计对其物相和光吸收性能进行了测试。结果表明，不连续的较薄Cu膜在沉积态下可观察到540 nm处的吸收峰，较厚的Cu膜通过在400 ℃下进行1 h热处理可在400 nm处获得微弱的吸收峰。沉积态的Al膜在可见光范围内无吸收峰，在热处理后，不连续的较薄Al膜可获得580 nm处的吸收峰，而较厚Al膜通过长时间热处理后可获得730 nm处的吸收峰。共溅射制得的较薄Cu-Al合金薄膜无须经过热处理，即可在可见光范围内获得吸收峰。 |
| 英文摘要: |
| In order to get significant surface plasma resonance(SPR)absorption peak for as-deposited Cu-Al alloy film, pure Cu and Al films, and Cu-Al alloy films were prepared by magnetron sputtering. X-ray diffractometer and UV-visible spectrophotometer were used to investigate the phases and optical absorption properties. The results showed that, discontinuous thinner Cu films of as-deposited state had a weak absorption peak at 540 nm, while thicker Cu films could get a low absorption peak by heat treatment at 400 ℃ for 1 h. The as-deposited Al films didn't manifest absorption peak in the region of visible range. Discontinuous thinner Al film got absorption peak at 580nm by heat treatment, and the thicker Al film showed absorption peak at 730 nm after heat treatment for a long time. There was obvious absorption peak of co-sputtered Cu-Al alloy film observed in the visible region without any heating process. |
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